Nano Letters · 2021 · 31 citations · 36 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMicroelectronicsSemiconductor MaterialsDielectricsNanoelectronicsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor PhysicsSuperconducting MaterialsAluminum NitrideFabricationGate Dielectric EngineeringHeterostructuresHexagonal Boron NitrideJosephson JunctionsJunction Field-effect TransistorsSuperconducting Heterostructures
Epitaxial Al-InAs heterostructures appear as a promising materials platform for exploring mesoscopic and topological superconductivity. A unique property of Josephson junction field effect transistors (JJ-FETs) fabricated on these heterostructures is the ability to tune the supercurrent using a metallic gate. Here, we report the fabrication and measurement of gate-tunable Al-InAs JJ-FETs in which the gate dielectric in contact with the InAs is produced by mechanically exfoliated hexagonal boron nitride (h-BN) followed by dry transfer. We discuss a versatile fabrication process that enables compatibility between layered material transfer and Al-InAs heterostructures that allows us to achieve full gate-tunability of supercurrent by using only 5 nm thick h-BN flakes. Our study shows that pristine properties of epitaxial Josephson junctions, such as product of normal resistance and critical current, IcRn, are preserved. Furthermore, complementary measurements confirm that using h-BN dielectric changes the channel density less when compared to atomic layer deposition of Al2O3.
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Boron nitride substrates for high-quality graphene electronics
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