Publication | Closed Access
β-Ga2O3 MOSFETs on the Si substrate fabricated by the ion-cutting process
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Citations
18
References
2020
Year
Materials ScienceElectrical EngineeringSi SubstrateEngineeringIon ImplantationMicrofabricationApplied Physicsβ-Ga2o3 MosfetsIon-cutting ProcessGallium OxideSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSemiconductor Device
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