Design and characterization of RF MEMS capacitive shunt switch for X, Ku, K and Ka band applications

Performance of low-loss RF MEMS capacitive switches

Charles L. Goldsmith, Zhimin Yao, S. Eshelman et al. · IEEE Microwave and Guided Wave Letters · 1998 · 428 citations

Engineering, Electrical Engineering, Materials Science +17

Lifetime characterization of capacitive RF MEMS switches

C. Goldsmith, J. Ehmke, A. Malczewski et al. · 2002 · 341 citations

Engineering, Electrical Engineering, Materials Science +17

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

W. Merlijn van Spengen, Robert Puers, R. Mertens et al. · Journal of Micromechanics and Microengineering · 2004 · 246 citations

Engineering, Electrical Engineering, Electronic Materials +16

Characterization of contact electromechanics through capacitance-voltage measurements and simulations

Edward Chan, Krishna Garikipati, R.W. Dutton · Journal of Microelectromechanical Systems · 1999 · 133 citations

Engineering, Electrical Engineering, Materials Science +17

Monolithically integrated micromachined RF MEMS capacitive switches

Jae Yeong Park, Geun H. Kim, Ki Woong Chung et al. · Sensors and Actuators A Physical · 2001 · 131 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11