Publication | Closed Access
Development of super-smooth flat silicon mirror substrates using bowl-feed chemical-mechanical polishing
20
Citations
8
References
2020
Year
Materials ScienceWafer Scale ProcessingEngineeringBowl-feed Chemical-mechanical PolishingMicrofabricationSurface ScienceApplied PhysicsMechanical EngineeringFabrication TechniqueSilicon On InsulatorMicroelectronicsSurface ProcessingGraded-reflectivity MirrorsDepth-graded Multilayer Coating
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