Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes

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Materials Science, Block Copolymer Lithography, Block Co-polymers +8

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Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues

E. P. Gusev, E. Cartier, D. A. Buchanan et al. · Microelectronic Engineering · 2001 · 385 citations

Materials Engineering, Materials Science, Engineering +8

The use of atomic layer deposition in advanced nanopatterning

Adriaan J. M. Mackus, Ageeth A. Bol, W. M. M. Kessels · Nanoscale · 2014 · 372 citations

Structural and XPS characterization of ALD Al2O3 coated porous silicon

Igor Iatsunskyi, Mateusz Kempiǹski, Mariusz Jancelewicz et al. · Vacuum · 2014 · 322 citations

Materials Engineering, Materials Science, Aluminium Nitride +8