Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact - Concepedia

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Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact

DOI Full Paper Access

76

Citations

35

References

2020

Year

Yuqing Huang, Mingdun Liao, Zhixue Wang, Xueqi Guo, Chun‐Sheng Jiang, Qing Yang, Zhizhong Yuan, Dandan Huang, Jie Yang, Xinyu Zhang,

Solar Energy Materials and Solar Cells

Materials EngineeringMaterials ScienceEngineeringMicrofabricationUltrathin SiliconSurface ScienceApplied PhysicsN-type PolysiliconSilicon On InsulatorMicroelectronicsPlasma EtchingPlasma Processing

References

	Year	Citations

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