Concepedia

Osamu Maida

OM

Statistics

Publications

22

Citations

788

H-Index

16

Active since

2002

Affiliations

The University of Osaka(Current)

Osaka Research Institute of Industrial Science and Technology

Japan Science and Technology Agency

National Institute for Materials Science

SPring-8

Osamu Maida is an author at The University of Osaka specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceChemistryMicroelectronicsChemical EngineeringNanoelectronicsPhysicsThin Films

Publications per year

2002–2022

22

Publications

22

Nitric acid oxidation of Si to form ultrathin silicon dioxide layers with a low leakage current density

Hikaru Kobayashi Asuha, Osamu Maida, Masao Takahashi et al. · Journal of Applied Physics · 2003 · 223 citations

Semiconductors, Chemical Engineering, Electrical Engineering +15

Ultrathin silicon dioxide layers with a low leakage current density formed by chemical oxidation of Si

Asuha, Takuya Kobayashi, Osamu Maida et al. · Applied Physics Letters · 2002 · 104 citations

Engineering, Integrated Circuits, Chemistry +18

Characterization of diamond ultraviolet detectors fabricated with high-quality single-crystalline chemical vapor deposition films

Yoko Iwakaji, M. Kanasugi, Osamu Maida et al. · Applied Physics Letters · 2009 · 44 citations

Engineering, Vacuum Device, Optical Properties +16

Preparation and Characterization of High-<i>k</i>Praseodymium and Lanthanoid Oxide Thin Films Prepared by Pulsed Laser Deposition

Satoshi Kitai, Osamu Maida, Takeshi Kanashima et al. · Japanese Journal of Applied Physics · 2003 · 39 citations

Engineering, Laser Applications, Optoelectronic Devices +16

Decrease in the leakage current density of Si-based metal–oxide–semiconductor diodes by cyanide treatment

Akira Asano, Asuha, Osamu Maida et al. · Applied Physics Letters · 2002 · 38 citations

Engineering, Cyanide Treatment, Integrated Circuits +18

Rows per page

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