Ceramics International · 2020 · 22 citations · 33 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAtomic Layer DepositionChemical Vapor DepositionMetal OxidesThin Film Thermal PropertiesThin-film DepositionThin-film MaterialsPlasma-enhanced Atomic Layer DepositionPlasma-enhanced DepositionPrecursor ChemistryThermal Atomic Layer DepositionThin Oxide FilmsThin Oxide LayersThin-film Growth MechanismsThin-film Oxides
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Growth of carbon nanotubes by catalytic decomposition of CH4 or CO on a NiMgO catalyst
P. Chen, H.-B. Zhang, Guo-Dong Lin et al. · Carbon · 1997 · 354 citations