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High-precision mechanical polishing method for diamond substrate using micron-sized diamond abrasive grains

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringApplied PhysicsAbrasive ProcessDiamond SubstrateSurface PolishingAbrasive MachiningMicrostructureMetal Processing