Publication | Closed Access
The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
19
Citations
40
References
2019
Year
Materials ScienceMaterials EngineeringEngineeringElectron-beam LithographyTarget FabricationSurface ScienceApplied PhysicsIndustrial-scale Planar Mo-targetThin Film Process TechnologySputter PerformanceMicroelectronicsThin Film ProcessingTarget Erosion
| Year | Citations | |
|---|---|---|
Page 1
Page 1