Concepedia

Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films

B.S.S. Brito, Ivoneide Santos, V.F.D. Soares, A.R. Terto, Givanilson Brito de Oliveira, Roberto Hübler, Wilton Walter Batista, Eduardo Kirinus Tentardini

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2019 · 28 citations · 16 references

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References

16

Handbook of Thin-Film Deposition Processes and Techniques

M. Henini · Microelectronics Journal · 2000 · 295 citations

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The effects of Si addition on the structure and mechanical properties of ZrN thin films deposited by an r.f. reactive sputtering method

Takehiko Mae, M. Nosé, Min Zhou et al. · Surface and Coatings Technology · 2001 · 71 citations

, , +13

Characterization of zirconium oxynitride films obtained by radio frequency magnetron reactive sputtering

M.A. Signore, A. Rizzo, L. Mirenghi et al. · Thin Solid Films · 2007 · 62 citations

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Structural, mechanical, electrical and wetting properties of ZrN films deposited by Ar/N2 vacuum arc discharge: Effect of nitrogen partial pressure

B. Abdallah, M. Naddaf, M. A-Kharroub · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2013 · 43 citations

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Microstructure, mechanical properties and oxidation resistance of (Zr, Hf)Nx coatings by magnetron co-sputtering

Zhengtao Wu, Zhengbing Qi, D.F. Zhang et al. · Surface and Coatings Technology · 2015 · 33 citations

, , +13