Takehiko Mae

Influence of sputtering conditions on the structure and properties of Ti–Si–N thin films prepared by r.f.-reactive sputtering

M. Nosé, Yutaka Deguchi, Takehiko Mae et al. · Surface and Coatings Technology · 2003 · 89 citations

Materials Science, Materials Engineering, Engineering +9

Microstructure and mechanical properties of Zr–Si–N films prepared by rf-reactive sputtering

M. Nosé, Wen‐An Chiou, Min Zhou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 72 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +20

The effects of Si addition on the structure and mechanical properties of ZrN thin films deposited by an r.f. reactive sputtering method

Takehiko Mae, M. Nosé, Min Zhou et al. · Surface and Coatings Technology · 2001 · 71 citations

Materials Engineering, Materials Science, Engineering +9

Properties of Zr–Si–N coatings prepared by RF reactive sputtering

M. Nosé, Mi Zhou, T. Nagae et al. · Surface and Coatings Technology · 2000 · 62 citations

Materials Science, Materials Engineering, Rf Reactive Sputtering +6

Structure and properties of Cr–B, Cr–B–N and multilayer Cr–B/Cr–B–N thin films prepared by r.f.-sputtering

Y. Sakamaoto, M. Nosé, Takehiko Mae et al. · Surface and Coatings Technology · 2003 · 40 citations

Materials Science, Thin Film Physics, Material Analysis +9