Concepedia

The effects of Si addition on the structure and mechanical properties of ZrN thin films deposited by an r.f. reactive sputtering method

Takehiko Mae, M. Nosé, Min Zhou, T. Nagae, Kisaburo Shimamura

Surface and Coatings Technology · 2001 · 71 citations · 10 references

Concepts

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsSi AdditionThin FilmsZrn Thin FilmsMicroelectronicsReactive Sputtering MethodChemical Vapor DepositionThin Film Processing

References

10

Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method

Tsutomu Ikeda, Hiroshi Satoh · Thin Solid Films · 1991 · 304 citations

Recent progress in the superhard nanocrystalline composites: towards their industrialization and understanding of the origin of the superhardness

S. Vepřek, Pavel Nesládek, A. Niederhofer et al. · Surface and Coatings Technology · 1998 · 247 citations

Materials Science, Materials Engineering, Nanocrystalline Material +9

Very high rate reactive sputtering of TiN, ZrN and HfN

William D. Sproul · Thin Solid Films · 1983 · 155 citations

Materials Science, Materials Engineering, Engineering +3

Structure and properties of Ti-B-N coatings

W. Gissler · Surface and Coatings Technology · 1994 · 133 citations

Materials Engineering, Materials Science, Engineering +3

High temperature oxidation behaviour of (Ti1−xCrx)N coatings

Yukako Otani, S. Hofmann · Thin Solid Films · 1996 · 90 citations

Materials Science, Materials Engineering, Engineering +4