Concepedia

Very high rate reactive sputtering of TiN, ZrN and HfN

William D. Sproul

Thin Solid Films · 1983 · 155 citations · 4 references

DOI

Concepts

References

4

The adhesion of chemically vapour-deposited hard coatings to steel—the scratch test

A.J. Perry · Thin Solid Films · 1981 · 121 citations

, , +14

Adhesion studies of ion-plated TiN on steel

A.J. Perry · Thin Solid Films · 1981 · 72 citations

, , +14

Preparation of titanium nitride by a pulsed d.c. magnetron reactive deposition techniques using the moving mode of deposition

Alex Aronson, Deyan Chen, W. H. Class · Thin Solid Films · 1980 · 66 citations

, , +6

Advances in high rate sputtering with magnetron-plasmatron processing and instrumentation

S. Schiller, U. Heisig, K. Goedicke et al. · Thin Solid Films · 1979 · 43 citations

, , +14