Concepedia

Yutaka Deguchi

YD

Statistics

Publications

2

Citations

109

H-Index

2

Active since

2003

Affiliations

University of Toyama(Current)

Takaoka University of Law

National Institute of Technology, Toyama College

The University of Osaka

Yutaka Deguchi is an author at University of Toyama specializing in applied physics, engineering, and materials engineering.

Top concepts

Publications per year

2003–2003

2

Publications

2

Influence of sputtering conditions on the structure and properties of Ti–Si–N thin films prepared by r.f.-reactive sputtering

M. Nosé, Yutaka Deguchi, Takehiko Mae et al. · Surface and Coatings Technology · 2003 · 89 citations

, , +9

Influence of sputtering conditions on microstructure and mechanical properties of Zr–Si–N films prepared by radio-frequency-reactive sputtering

Min Zhou, M. Nosé, Yutaka Deguchi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 20 citations

, , +13

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