Effect of post-deposition annealing on atomic layer deposited SiO2 film for silicon surface passivation

Shizheng Li, Jiahui Xu, Liangxing Wang, Ning Yang, Xiaojun Ye, Xiao Yuan, Haitao Xiang, Cui Liu, Hongbo Li

Materials Science in Semiconductor Processing · 2019 · 25 citations · 36 references

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