Duplex mode tilt measurements based on a MEMS biaxial resonant accelerometer

Characterization of phase and frequency instabilities in precision frequency sources: Fifteen years of progress

J. Rutman · Proceedings of the IEEE · 1978 · 555 citations

Engineering, Electrical Engineering, Physics +15

A vacuum packaged surface micromachined resonant accelerometer

Ashwin A. Seshia, Moorthi Palaniapan, T.A. Roessig et al. · Journal of Microelectromechanical Systems · 2002 · 335 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Surface-micromachined resonant accelerometer

T.A. Roessig, Roger T. Howe, Albert P. Pisano et al. · 2002 · 177 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Sensing Tilt With MEMS Accelerometers

Sergiusz Łuczak, Waldemar Oleksiuk, M. Bodnicki · IEEE Sensors Journal · 2006 · 151 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

Claudia Comi, Alberto Corigliano, Giacomo Langfelder et al. · Journal of Microelectromechanical Systems · 2010 · 150 citations

Engineering, Electrical Engineering, Mechanical Engineering +17