Sensors · 2019 · 26 citations · 17 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationOpticsMems DesignMems FabricationMems ModelingMems ResonatorsMems SimulationOptical ResonatorsFabricationGyroscopesMicroelectromechanical OscillatorsMicroresonatorsResonant MemsResonator CouplingResonator Quality FactorWhispering-gallery-mode Resonators
In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle-the transformation process from angular velocity to the resonance wavelength of the WGM resonator-is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.
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A high-resolution microchip optomechanical accelerometer
Alexander G. Krause, Martin Winger, T. D. Blasius et al. · Nature Photonics · 2012 · 679 citations · Full text
Engineering, Mechanical Engineering, Mechatronics Engineering +12
Ultrahigh-quality-factor silicon-on-insulator microring resonator
J. Niehusmann, A. Vörckel, P. Haring Bolívar et al. · Optics Letters · 2004 · 286 citations