High precision computer-generated moiré profilometry

Abstract

Recently, a computer-generated moiré profilometry was proposed by our research group. It can effectively avoid the influence of the transient caused by moiré fringes' direct acquisition and generally owns a higher accuracy. But when the spatial spectrum of the captured deformed pattern is severely aliased caused by the measured object, the accuracy of this method may be affected to some extent due to the impure background light component extraction. So, a high precision computer-generated moiré profilometry based on background light component's accurate elimination is proposed. By adding an additional special phase-shifting sinusoidal grating to accurately extract valid information in the spatial domain and improve the sinusoidal feature of the pattern, the measurement precision can be improved effectively. Though the single-shot feature is broken, the real-time measuring feature is still maintained successfully. Experimental results show the feasibility and validity of the proposed method.