Concepedia

Publication | Open Access

Modeling reactive magnetron sputtering: Opportunities and challenges

DOIFull Paper Access

27

Citations

18

References

2019

Year

Diederik Depla, Koen Strijckmans, Florian Cougnon, R. Dedoncker, R. Schelfhout, I.C. Schramm, Filip Moens, Roger De Gryse
Thin Solid Films

References

YearCitations

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