Concepedia
Thin Solid Films · 2019 · 27 citations · 18 references
Open access
Natural SciencesMaterials SciencePhysicsComputational Materials ScienceCondensed Matter PhysicsPlasma-wall InteractionsMagnetron SputteringSputteringSputtering Processes
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Fundamental understanding and modeling of reactive sputtering processes
S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations
Engineering, Materials Engineering, Materials Science +10
Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
J. E. Greene · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 324 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +15
Calculation of deposition rates in diode sputtering systems
W. D. Westwood · Journal of Vacuum Science and Technology · 1978 · 291 citations
Natural Sciences, Electrical Engineering, Materials Science +13
Magnetron sputter deposition: Linking discharge voltage with target properties
Diederik Depla, Stijn Mahieu, Roger De Gryse · Thin Solid Films · 2008 · 212 citations
Natural Sciences, Materials Engineering, Materials Science +10
The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation
K. Van Aeken, Stijn Mahieu, Diederik Depla · Journal of Physics D Applied Physics · 2008 · 204 citations
Natural Sciences, Materials Science, Physics +15