Surface and Coatings Technology · 2019 · 20 citations · 37 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface EngineeringEtching ProcessesMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesPlasma Surface TreatmentSurface MicromachiningEtchingPlasma EtchingSurface EtchingTextured Materials
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