A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor

Multiscale Hierarchical Design of a Flexible Piezoresistive Pressure Sensor with High Sensitivity and Wide Linearity Range

Jidong Shi, Liu Wang, Zhaohe Dai et al. · Small · 2018 · 511 citations

Engineering, Materials Engineering, Materials Science +17

Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

J. Salvia, Renata Melamud, Saurabh A. Chandorkar et al. · Journal of Microelectromechanical Systems · 2009 · 210 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer

Qin Liu, Shixin Pang, XU Kai-xian et al. · Sensors and Actuators A Physical · 2012 · 118 citations

Engineering, Materials Engineering, Materials Science +13

A ±0.3 ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing

Chang-Shun Liu, Roozbeh Tabrizian, Farrokh Ayazi · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2018 · 54 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

The Thermal Drift Characteristics of Piezoresistive Pressure Sensor

R. Otmani, N. Benmoussa, B. Benyoucef · Physics Procedia · 2011 · 41 citations · Full text

Engineering, Materials Engineering, Materials Science +17