Molecular beam epitaxy, atomic layer deposition, and multiple functions connected via ultra-high vacuum

Keng-Yung Lin, Hsien-Wen Wan, K.H.M. Chen, Y. T. Fanchiang, W.S. Chen, Y.H. Lin, Yi-Ting Cheng, C.C. Chen, H. Y. Lin, L. Young,

Journal of Crystal Growth · 2019 · 23 citations · 75 references

Concepts

References

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