Nb<sub>5</sub>N<sub>6</sub> microbolometer for sensitive, fast-response, 2-µm detection

Xuecou Tu, Peng Xiao, Lin Kang, Chengtao Jiang, Xinle Guo, Zhou Jiang, Runfeng Su, Xiaoqing Jia, Jian Chen, Peiheng Wu

Optics Express · 2018 · 11 citations · 34 references

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Concepts

Abstract

device. The performance could be improved further by optimizing the design and operating parameters. This study revealed a simple low-cost technique to develop a large-scale focal plane array in silicon for infrared detection.

References

34