Publication | Closed Access

Direct bonding of silicon and quartz glass using VUV/O3 activation and a multistep low-temperature annealing process

Materials EngineeringMaterials ScienceVuv/o3 ActivationGlass-ceramicEngineeringQuartz GlassOptical GlassSurface ScienceApplied PhysicsGlass MaterialDirect BondingSilicon On InsulatorMicroelectronics