Direct bonding of silicon and quartz glass using VUV/O3 activation and a multistep low-temperature annealing process

Hydrophobicity recovery of polydimethylsiloxane after exposure to corona discharges

Henrik Hillborg, Ulf W. Gedde · Polymer · 1998 · 431 citations

Natural Sciences, Materials Engineering, Materials Science +12

Mechanisms for room temperature direct wafer bonding

Thomas Plach, Kurt Hingerl, Sajjad Tollabimazraehno et al. · Journal of Applied Physics · 2013 · 188 citations

Engineering, Materials Engineering, Materials Science +17

Extended-Nanofluidics: Fundamental Technologies, Unique Liquid Properties, and Application in Chemical and Bio Analysis Methods and Devices

Kazuma Mawatari, Yutaka Kazoe, Hisashi Shimizu et al. · Analytical Chemistry · 2014 · 118 citations

Engineering, Biomedical Engineering, Chemical Engineering +17

Investigation of nitric oxide and Ar annealed SiO2/SiC interfaces by x-ray photoelectron spectroscopy

Huifeng Li, Sima Dimitrijev, D. Sweatman et al. · Journal of Applied Physics · 1999 · 116 citations

Natural Sciences, Materials Engineering, Materials Science +17

XPS study of SiO thin films and SiO-metal interfaces

T.P. Nguyen, S. Lefrant · Journal of Physics Condensed Matter · 1989 · 96 citations

Natural Sciences, Chemistry, Materials Science +15