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Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets

37

Citations

26

References

2018

Year

Abstract

Laser-induced cavitation and subsequent fragmentation of free-falling tin microdroplets finds application in producing extreme ultraviolet (EUV) light for state-of-the-art EUV nanolithography. Studies of such laser-droplet systems are scarce, though. This work combines analysis of high-resolution stroboscopic shadowgraphy with intuitive fluid-dynamics models to further our understanding of the late-time dynamics of a tin microdroplet after the impact of a picosecond laser pulse. The insight obtained offers a means to engineer optimal laser targets for EUV light generation from laser-driven plasma.

References

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