Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets

Dmitry Kurilovich, Tiago Pinto, Francesco Torretti, Ruben Schupp, Joris Scheers, Aneta Stodólna, Hanneke Gelderblom, K. S. E. Eikema, Stefan Witte, W. Ubachs,

Physical Review Applied · 2018 · 40 citations · 26 references

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Abstract

Laser-induced cavitation and subsequent fragmentation of free-falling tin microdroplets finds application in producing extreme ultraviolet (EUV) light for state-of-the-art EUV nanolithography. Studies of such laser-droplet systems are scarce, though. This work combines analysis of high-resolution stroboscopic shadowgraphy with intuitive fluid-dynamics models to further our understanding of the late-time dynamics of a tin microdroplet after the impact of a picosecond laser pulse. The insight obtained offers a means to engineer optimal laser targets for EUV light generation from laser-driven plasma.

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