Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy - Concepedia

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Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy

10

Citations

23

References

2017

Year

Peter Meszmer, Raúl D. Rodriguez, Evgeniya Sheremet, Dietrich R. T. Zahn, Bernhard Wunderle

Microelectronics Reliability

Materials ScienceMicro-raman SpectroscopyEngineeringHigh SensitivityMicrofabricationMicroscopySpectroscopyApplied PhysicsStressstrain AnalysisScanning Force MicroscopyNanometrologyMicro-electromechanical SystemMicrostructure

References

	Year	Citations

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