Concepedia

Publication | Open Access

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

DOIFull Paper Access

19

Citations

45

References

2017

Year

Zoltán Donkó, Aranka Derzsi, Ihor Korolov, Péter Hartmann, Steven Brandt, Julian Schulze, Birk Berger, M. E. Koepke, Benoit G. Bruneau, Erik Johnson,
Plasma Physics and Controlled Fusion

Abstract

International audience

References

YearCitations

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