Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor

Hangil Kim, Min Young Lee, Soo‐Hyun Kim, So Ik Bae, Kyung Yong Ko, Hyungjun Kim, Kyeong-Woo Kwon, Jin-Ha Hwang, Do-Joong Lee

Applied Surface Science · 2015 · 45 citations · 32 references

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