Applied Surface Science · 2015 · 45 citations · 32 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAtomic Layer DepositionMetal Oxide NanomaterialsMetal OxidesThin-film DepositionThin-film MaterialsAtomic Layer Deposition PrecursorsCopper DepositionMetal Thin FilmsPrecursor ChemistryThin Oxide Films
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David Prendergast, Ferenc Borondics, Soeren Porsgaard et al. · The Journal of Chemical Physics · 2013 · 315 citations · Full text