Study on chemical mechanical polishing of silicon wafer with megasonic vibration assisted

The Theory and Design of Plate Glass Polishing Machines

F. W. Preston · Medical Entomology and Zoology · 1927 · 740 citations

Engineering, Manufacturing Engineering, Materials Engineering +6

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A. Karimi, Juliette Martin · International Materials Reviews · 1986 · 219 citations

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Cavitation erosion of materials

A. Karimi, Juliette Martin · International Metals Reviews · 1986 · 184 citations

Natural Sciences, Materials Science, Mechanical Behavior Of Materials +4

Mechanism of particle removal by megasonic waves

Wonjung Kim, Tae‐Hong Kim, Jaehyuck Choi et al. · Applied Physics Letters · 2009 · 123 citations

Engineering, Physics, Colloid Science +12

Effects of pad properties on material removal in chemical mechanical polishing

K.H. Park, Hyo Ju Kim, Okkyung chang et al. · Journal of Materials Processing Technology · 2007 · 103 citations

Engineering, Materials Engineering, Materials Science +16