Publication | Closed Access
Effects of pad properties on material removal in chemical mechanical polishing
101
Citations
1
References
2007
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial ProcessingCorrosionMechanical EngineeringPad PropertiesMaterial RemovalChemical Mechanical PolishingSurface TreatmentSurface PolishingSurface ProcessingAbrasive MachiningAbrasive Process
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