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Layer-by-layer thinning of MoSe 2 by soft and reactive plasma etching

Materials ScienceLayer-by-layer ThinningEngineeringNanoelectronicsMose 2Surface ScienceApplied PhysicsMultilayer HeterostructuresLayered MaterialMicroelectronicsPlasma EtchingChemical Vapor DepositionThin Film ProcessingReactive Plasma