Diamond and Related Materials · 2017 · 12 citations · 23 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationEtching ProcessesLaser Material ProcessingLaser PhysicsLaser Surface ProcessingMachiningUltrafast OpticsDeep EtchingDeep Reactive Ion EtchingFemtosecond Laser PulsesLaser Beam MachiningReactive Ion Etching
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Femtosecond laser-induced periodic surface structure on diamond film
Qihong Wu, Yurong Ma, Rongchuan Fang et al. · Applied Physics Letters · 2003 · 261 citations
Natural Sciences, Materials Engineering, Materials Science +16
Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection
M. Rothschild, C. Arnone, D. J. Ehrlich · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 129 citations
Natural Sciences, Materials Engineering, Materials Science +15