Sensors and Actuators B Chemical · 2017 · 16 citations · 18 references
EngineeringMaterials ScienceMechanical EngineeringMetrologyMicroelectromechanical SystemsMicrofabricationMems CharacterizationMems DesignMems ModelingMems SimulationMicroelectromechanical SensorsNanomechanicsCantilever MechanicsMems MetrologyMetrology Of Microelectromechanical SystemsMicro-metrologyMicrocantilever SensorsMicromechanical TestingModes Of Operation
18
Micromechanical cantilever-based biosensors
Roberto Raiteri, M. Grattarola, Hans‐Jürgen Butt et al. · Sensors and Actuators B Chemical · 2001 · 729 citations