Piezoelectrically transduced single-crystal-silicon plate resonators

Abstract

We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two resonator types are presented: one operates in the square extensional mode at 26 MHz with Q~18000 and motional resistance R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> ~0.240 kOmega, while the other resonator features a resonance at 22 MHz with Q~51000 and R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> ~1.5 kOmega. The resonators are characterized electrically and by scanning laser interferometry. Measured vibration fields are compared to simulated eigenmodes.