Concepedia

Publication | Closed Access

Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms

DOI

64

Citations

15

References

2016

Year

Yan Zhou, Guoshun Pan, Hua Gong, Xiao‐Lei Shi, Chunli Zou
Colloids and Surfaces A Physicochemical and Engineering Aspects

References

YearCitations

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