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Study on the processing characteristics of SiC and sapphire substrates polished by semi-fixed and fixed abrasive tools

Materials EngineeringMaterials ScienceProcessing CharacteristicsEngineeringMaterial ProcessingCorrosionMaterial MachiningSurface ScienceMechanical EngineeringFixed Abrasive ToolsAbrasive ProcessMachiningSurface PolishingAbrasive MachiningMicrostructure