Development of ΔE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films - Concepedia

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Development of ΔE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films

DOI Full Paper Access

23

Citations

23

References

2016

Year

Isao Harayama, Kayo Nagashima, Yasushi Hirose, Hideaki Matsuzaki, Daiichiro Sekiba

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Mev 35Cl7+EngineeringPhysicsNatural SciencesSpectroscopyApplied PhysicsδE-e Telescope ErdaThin FilmsSynchrotron RadiationInstrumentationSynchrotron Radiation Source

References

	Year	Citations

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