Comparison of TOF-ERDA and nuclear resonance reaction techniques for range profile measurements of keV energy implants

Janne J. Jokinen, J. Keinonen, P. Tikkanen, A. Kuronen, T. Ahlgren, K. Nordlund

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 142 citations · 45 references

Concepts

References

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