69‐1: <i>Invited Paper</i> : Oxide TFT Development for AMLCDs and AMOLEDs

Abstract

Various structures of oxide TFT have been developed for the commercialization of high‐end displays. Etch stopper structure were applied to both OLED and LCD products considering the uniformity and stability at Gen. 8 line. For larger OLED TV with higher resolution, self‐aligned coplanar structure has been developed to minimize parasitic capacitance. Back‐channel etched (BCE) structure has been also implemented to improve the display performance and the fabrication cost.