NASA Technical Reports Server (NASA) · 1973 · 38 citations · 0 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsCharge-coupled DevicesComplementary Metal-oxide-semiconductor TechnologyElectric CircuitsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor InterfacesGate DielectricsMetal GatesPolysilicon