Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(Al Ga1−)2O3 films - Concepedia

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Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(Al Ga1−)2O3 films

57

Citations

23

References

2015

Year

Ryo Wakabayashi, Takayoshi Oshima, Mai Hattori, Kohei Sasaki, Takekazu Masui, Akito Kuramata, Shigenobu Yamakoshi, K. Yoshimatsu, Akira Ohtomo

Journal of Crystal Growth

Materials EngineeringMaterials ScienceEngineeringOxygen-radical-assisted Pulsed-laser DepositionApplied PhysicsGallium OxideLaser-assisted DepositionThin FilmsPulsed Laser Deposition

References

	Year	Citations

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