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Silicon excess and thermal annealing effects on structural and optical properties of co-sputtered SRO films

Materials ScienceEpitaxial GrowthOptical MaterialsEngineeringPhysicsOptical PropertiesOxide ElectronicsApplied PhysicsSilicon ExcessThin FilmsSilicon On InsulatorMicroelectronicsThin Film ProcessingCo-sputtered Sro Films