Thin Solid Films · 2016 · 32 citations · 31 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAtomic Layer DepositionMetal OxidesOxide SemiconductorsSemiconductor Crystal GrowthSemiconductor Device MaterialsThin Film AnnealingAnnealing Temperature EffectsAtomic Layer Deposition PrecursorsOxide Growth KineticsTemperature Effects On DepositionZinc Oxide Nanostructures
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