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Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low- k dielectrics studied using monoenergetic positron beams

Materials ScienceEngineeringSelf-assembled MonolayersMonoenergetic Positron BeamsMicrofabricationNanoporous MaterialSurface ScienceApplied PhysicsPorous MembraneSurface EngineeringMetal DiffusionElectronic PackagingElectrical Insulation