Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications - Concepedia

Concepedia

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Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

13

Citations

33

References

2016

Year

Maria Berdova, Claudia Wiemer, Alessio Lamperti, G. Tallarida, E. Cianci, L. Lamagna, Stefano Losa, S. Rossini, R. Somaschini, Salvatore Gioveni,

Applied Surface Science

Materials ScienceEngineeringCorrosionSurface ScienceApplied PhysicsProtective CoatingsChemical DepositionMulti-functional CoatingSurface ProcessingChemical Vapor DepositionAtomic Layer DepositionHafnium DioxideProtective Coating

References

	Year	Citations

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