L. Lamagna

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 94 citations · Full text

Engineering, Thin Film Process Technology, Chemistry +17

Vibrational and electrical properties of hexagonal La2O3 films

G. Scarel, A. Debernardi, Dimitra Tsoutsou et al. · Applied Physics Letters · 2007 · 63 citations

Materials Science, Oxide Heterostructures, Hexagonal La2o3 Films +11

Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma

Noémi Leick, Rof Verkuijlen, L. Lamagna et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 60 citations · Full text

Materials Science, Chemical Engineering, Engineering +15

Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method

Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue et al. · Nanoscale · 2013 · 44 citations

Cubic/Tetragonal Phase Stabilization in High-κ ZrO2 Thin Films Grown Using O3-Based Atomic Layer Deposition

Alessio Lamperti, L. Lamagna, G. Congedo et al. · Journal of The Electrochemical Society · 2011 · 43 citations

Materials Science, Oxide Heterostructures, Engineering +15