Materials Science in Semiconductor Processing · 2016 · 19 citations · 32 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDefects In Electronic MaterialsDielectricsMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor DefectsSemiconductor Device MaterialsAnnealing EffectsDefect StatesOxide Defect StatesOxide DielectricsOxygen VacanciesOxygen Vacancies In Metal OxidesZinc Oxides
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