Surface Science Spectra · 2001 · 23 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceSpectroscopySurface ScienceThin FilmsChemical Vapor DepositionIron OxidesMetal OxidesPhotoelectron SpectroscopySurface OxidationX-ray Photoelectron SpectroscopyCarbon Content AnalysisChemical Vapor Deposition PrecursorsExcitationOxide Electronic StructureSurface Oxidation MechanismsSurface Oxidation StatesThin Oxide FilmsThin-film Oxides
In the present study, x-ray photoelectron spectroscopy (XPS) was employed to investigate the principal core levels of a Fe2O3 thin film. The sample was deposited on glass in a N2+O2 atmosphere by chemical vapor deposition (CVD), using Fe(acac)3 (Hacac = 2,4-pentanedione) as the source compound. XPS surface data for the Fe 2p3/2, O 1s, and C 1s photoelectrons, obtained by an Al Kα monochromatized excitation source, are reported. Deconvolution of the O 1s signal revealed the presence of –OH groups along with the major component ascribed to lattice oxygen. The relatively high carbon content in the film indicated an incomplete decomposition of the used precursor.
11
Handbook of X-Ray Photoelectron Spectroscopy
J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations
Vacuum · 1994 · 3.3K citations