Concepedia

Cross-sectional atom probe tomography sample preparation for improved analysis of fins on SOI

Andrew J. Martin, Weihao Weng, Zhengmao Zhu, Rainer Loesing, James P. Shaffer, Ahmad D. Katnani

Ultramicroscopy · 2015 · 12 citations · 24 references

DOI

Concepts

References

24

In situ site-specific specimen preparation for atom probe tomography

Keith Thompson, D. Lawrence, DJ Larson et al. · Ultramicroscopy · 2006 · 1.7K citations

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Trajectory overlaps and local magnification in three-dimensional atom probe

F. Vurpillot, A. Bostel, D. Blavette · Applied Physics Letters · 2000 · 440 citations

, , +8

Spatial Resolution in Atom Probe Tomography

Baptiste Gault, Michael P. Moody, Frédéric De Geuser et al. · Microscopy and Microanalysis · 2010 · 182 citations · Full text

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A reproducible method for damage‐free site‐specific preparation of atom probe tips from interfaces

Peter Felfer, Talukder Alam, Simon P. Ringer et al. · Microscopy Research and Technique · 2011 · 153 citations

, , +10

Evolution of tip shape during field evaporation of complex multilayer structures

Emmanuelle A. Marquis, B. Geiser, Ty J. Prosa et al. · Journal of Microscopy · 2010 · 146 citations

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